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1. U.S. Patent # 5,002,631 issued on March 26, 1991 (with R. A. Gottscho and G. R. Scheller) "Plasma Etching Apparatus and Method" 2. U.S. Patent # 5,124,216 issued on June 23, 1992 (with R. A. Gottscho and C. A. Green) "Method for Monitoring Photoresist Latent Images" 3. U.S. Patent # 5,288,572 issued on 2/22/1994 (with R. A. Gottscho, and C. A. Green) "Method for Monitoring Photoresist Latent Images" 4. U.S. Patent # 5,464,664 issued on November 7, 1995, (with E. S. Aydil and R. A. Gottscho) "Downstream Ammonia Plasma Passivation of GaAs" 5. U.S. Patent # 5,883,005 issued on 3/16/99 (with T. K. Minton) "Semiconductor Etching by Hyperthermal Neutral Beams" 6. U.S. Patent # 6,700,329 issued: 3/2/04 (with M. R. Sankaran) "Method and Apparatus for Providing Flow-Stabilized Microdischarges in Metal Capillaries" 7. U.S. Patent # 6,924,401 issued: 8/2/05 (with M. R. Sankaran and S. McHugh) "Plasma Microjet Arrays for Selective Oxidation of Methane to Methanol" |